A New Fracture Engine For Curvilinear Masks And MULTIGON Mask Data

<p>Demand for better pattern fidelity and the adoption of ILT are increasing pressure to shift to curvilinear mask technology.</p> <p>The post <a href="https://semiengineering.com/a-new-fracture-engine-for-curvilinear-masks-and-multigon-mask-data/">A New Fracture Engine For Curvilinear Masks And MUL