Boosting EUV Conversion Efficiency With 2-Micron Dual-Beam Laser Irradiation

<p>Researchers from Utsunomiya University, RIKEN, The University of Tokyo, and Tohoku University, et al. have published “40% boost in extreme ultraviolet conversion efficiency via simultaneous dual-beam 2-µm laser irradiation”. Abstract “Scaling extreme ultraviolet (EUV) source power for next-genera