Study of EUV Nanostructures Using AFM With High-Aspect Ratio Tip (Purdue, Intel, Bruker)

<p>A new technical paper, &#8220;Characterizing tip-sample interaction dynamics on extreme ultraviolet nanostructures using atomic force microscopy with a high-aspect ratio tip,&#8221; was released by researchers at Purdue University, Intel Corporation and Bruker Corporation. Abstract &#8220;Accurat